一家晶圆制造公司使用悬浮区熔法来提纯多晶硅锭,每个硅锭具有均匀的横截面积,长度为 200 cm。该方法包括将杂质浓度为 C0C_0 atoms/cm3\text{cm}^3 的多晶硅锭放置在单个籽晶的顶部。然后通过射频(RF)线圈对多晶硅锭进行外部加热,从而使硅锭局部熔化。杂质更倾向于留在熔融态而非固态中,因此随着线圈和熔区向上移动,一个更纯的单晶在籽晶顶部凝固。该方法的原理示意图如图 1 和图 2 所示。 对于长度为 LL cm 的“悬浮”熔区,熔区中的杂质浓度 CC atoms/cm3\text{cm}^3 与射频线圈移动的距离 xx cm 满足以下微分方程:
dCdx=1L(C0−kC),\frac{\text{d}C}{\text{d}x} = \frac{1}{L}(C_0 - kC),
其中 kk 是一个常数,满足 0<k<10 < k < 1。
该公司采用的“悬浮”熔区长度 LL cm 为 2 cm,且 0≤x≤1980 \le x \le 198。已知当 x=0x = 0 时,C=C0C = C_0。

  1. (a)

    求解该微分方程,得到用 C0C_0、kk 和 xx 表示 CC 的表达式。

  2. (b)

    画出 CC 关于 xx 的图像。

  3. (c)

    假设 k=0.3k = 0.3,且射频线圈以每小时 8 mm 的恒定速度向上移动。求熔区内杂质浓度达到 2C02C_0 所需的时间,以及在这一时刻,杂质浓度的变化率(用 C0C_0 表示)。

  4. (d)

    该公司决定改变“漂浮”熔融区的长度。

    请解释并给出理由,说明较短的长度是否比较长的长度更可取。

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完整解法

11(a)

1. Substitute the given value of $L$ into the differential equation and separate the variables.

Given L=2L = 2, the differential equation becomes:
dCdx=12(C0−kC)\frac{\text{d}C}{\text{d}x} = \frac{1}{2}(C_0 - kC)
Separating the variables CC and xx:
∫1C0−kC dC=∫12 dx\int \frac{1}{C_0 - kC} \, \text{d}C = \int \frac{1}{2} \, \text{d}x

2. Integrate both sides to find the general solution.

−1kln⁡∣C0−kC∣=x2+A-\frac{1}{k} \ln |C_0 - kC| = \frac{x}{2} + A

3. Apply the initial condition to find the constant of integration, $A$.

Given that when x=0x = 0, C=C0C = C_0:
−1kln⁡∣C0−kC0∣=02+A-\frac{1}{k} \ln |C_0 - kC_0| = \frac{0}{2} + A
Since 0<k<10 < k < 1 and C0>0C_0 > 0, we have C0−kC0=C0(1−k)>0C_0 - kC_0 = C_0(1 - k) > 0. Therefore:
A=−1kln⁡[C0(1−k)]A = -\frac{1}{k} \ln [C_0(1 - k)]
Substituting AA back into the equation:
−1kln⁡∣C0−kC∣=x2−1kln⁡[C0(1−k)]-\frac{1}{k} \ln |C_0 - kC| = \frac{x}{2} - \frac{1}{k} \ln [C_0(1 - k)]

4. Rearrange the equation to make $C$ the subject.

Multiply the entire equation by −k-k:
ln⁡∣C0−kC∣=−kx2+ln⁡[C0(1−k)]\ln |C_0 - kC| = -\frac{kx}{2} + \ln [C_0(1 - k)]
ln⁡∣C0−kC∣−ln⁡[C0(1−k)]=−kx2\ln |C_0 - kC| - \ln [C_0(1 - k)] = -\frac{kx}{2}
ln⁡∣C0−kCC0(1−k)∣=−kx2\ln \left| \frac{C_0 - kC}{C_0(1 - k)} \right| = -\frac{kx}{2}
Since C0−kCC_0 - kC is positive initially and continuous, we can drop the absolute value:
C0−kCC0(1−k)=e−kx2\frac{C_0 - kC}{C_0(1 - k)} = e^{-\frac{kx}{2}}
C0−kC=C0(1−k)e−kx2C_0 - kC = C_0(1 - k)e^{-\frac{kx}{2}}
kC=C0−C0(1−k)e−kx2kC = C_0 - C_0(1 - k)e^{-\frac{kx}{2}}
C=C0k[1−(1−k)e−kx2]C = \frac{C_0}{k} \left[ 1 - (1 - k)e^{-\frac{kx}{2}} \right]

答案

C=C0k[1−(1−k)e−kx2]C = \frac{C_0}{k} \left[ 1 - (1 - k)e^{-\frac{kx}{2}} \right]

11(b)

1. Identify the initial point and horizontal asymptote from the solution for $C$.

From part (a), the solution is C=C0k(1−(1−k)e−kx2)C = \frac{C_0}{k} \left( 1 - (1-k) e^{-\frac{kx}{2}} \right).
When x=0x = 0, C=C0C = C_0.
As x→∞x \to \infty, e−kx2→0e^{-\frac{kx}{2}} \to 0 (since k>0k > 0).
Thus, C→C0kC \to \frac{C_0}{k}. The horizontal asymptote is C=C0kC = \frac{C_0}{k}.

2. Determine the shape of the curve based on the first derivative.

From the given differential equation, dCdx=12(C0−kC)\frac{\text{d}C}{\text{d}x} = \frac{1}{2}(C_0 - kC).
Since 0<k<10 < k < 1 and CC starts at C0C_0, the initial gradient is 12C0(1−k)>0\frac{1}{2}C_0(1-k) > 0.
As CC increases towards C0k\frac{C_0}{k}, the term (C0−kC)(C_0 - kC) remains positive but decreases towards 00.
Therefore, the gradient is positive but strictly decreasing, meaning the curve is increasing and concave downwards.

3. Sketch the graph incorporating the valid domain.

Draw the horizontal xx-axis and vertical CC-axis.
Plot the CC-intercept at (0,C0)(0, C_0).
Draw a horizontal dotted line at C=C0kC = \frac{C_0}{k} (note that C0k>C0\frac{C_0}{k} > C_0 since 0<k<10 < k < 1).
Draw a smooth, increasing, concave down curve from the intercept, approaching the asymptote.
Terminate the graph at x=198x = 198, matching the domain given in the context.

答案

A sketched curve on xx and CC axes with the following features:

  • CC-intercept: Point (0,C0)(0, C_0).
  • Shape: An increasing, concave downwards curve.
  • Asymptote: A horizontal dotted line at C=C0kC = \frac{C_0}{k} that the curve approaches from below.
  • Domain: The curve should be drawn for 0≤x≤1980 \le x \le 198.

11(c)

1. Briefly solve the differential equation from part (a) to express $C$ in terms of $x$, as the result is required.

As required from part (a), we first find the expression for CC by separating variables and integrating:
∫1C0−kC dC=∫12 dx\int \frac{1}{C_0 - kC} \,\text{d}C = \int \frac{1}{2} \,\text{d}x
−1kln⁡∣C0−kC∣=x2+A-\frac{1}{k} \ln |C_0 - kC| = \frac{x}{2} + A
Using the initial condition C=C0C = C_0 when x=0x = 0:
A=−1kln⁡(C0−kC0)=−1kln⁡(C0(1−k))A = -\frac{1}{k} \ln(C_0 - kC_0) = -\frac{1}{k} \ln(C_0(1-k))
ln⁡(C0−kCC0(1−k))=−kx2  ⟹  C=C0k(1−(1−k)e−kx2)\ln\left(\frac{C_0 - kC}{C_0(1-k)}\right) = -\frac{kx}{2} \implies C = \frac{C_0}{k}\left(1 - (1-k)e^{-\frac{kx}{2}}\right)

2. Substitute $C = 2C_0$ and $k = 0.3$ to find the distance $x$ moved.

2C0=C00.3(1−(1−0.3)e−0.3x2)2C_0 = \frac{C_0}{0.3}\left(1 - (1 - 0.3)e^{-\frac{0.3x}{2}}\right)
0.6=1−0.7e−0.15x0.6 = 1 - 0.7e^{-0.15x}
0.7e−0.15x=0.4  ⟹  e−0.15x=470.7e^{-0.15x} = 0.4 \implies e^{-0.15x} = \frac{4}{7}
x=−10.15ln⁡(47)=203ln⁡1.75≈3.7308 cmx = -\frac{1}{0.15}\ln\left(\frac{4}{7}\right) = \frac{20}{3}\ln 1.75 \approx 3.7308 \text{ cm}

3. Convert the speed to consistent units and calculate the time taken $t$.

The distance xx is in cm, so the upward speed must be in cm/h:
v=8 mm/h=0.8 cm/hv = 8 \text{ mm/h} = 0.8 \text{ cm/h}
t=xv=3.73080.8≈4.6635 hourst = \frac{x}{v} = \frac{3.7308}{0.8} \approx 4.6635 \text{ hours}
So the time taken is approximately 4.664.66 hours.

4. Set up the relationship for the rate of change of $C$ with respect to time using the chain rule.

dCdt=dCdx×dxdt\frac{\text{d}C}{\text{d}t} = \frac{\text{d}C}{\text{d}x} \times \frac{\text{d}x}{\text{d}t}
We know dxdt=0.8 cm/h\frac{\text{d}x}{\text{d}t} = 0.8 \text{ cm/h} and the differential equation gives dCdx=12(C0−kC)\frac{\text{d}C}{\text{d}x} = \frac{1}{2}(C_0 - kC).

5. Evaluate the rate of change of concentration at the instant when $C = 2C_0$.

At the instant when C=2C0C = 2C_0 and k=0.3k = 0.3:
dCdx=12(C0−0.3(2C0))=12(C0−0.6C0)=0.2C0\frac{\text{d}C}{\text{d}x} = \frac{1}{2}(C_0 - 0.3(2C_0)) = \frac{1}{2}(C_0 - 0.6C_0) = 0.2C_0
dCdt=(0.2C0)×0.8=0.16C0\frac{\text{d}C}{\text{d}t} = (0.2C_0) \times 0.8 = 0.16C_0

答案

Time taken: 4.664.66 hours (or 253ln⁡1.75\frac{25}{3}\ln 1.75 hours)
Rate of change: 0.16C00.16C_0 atoms/cm3^3 per hour

11(d)

1. Concisely solve the differential equation from part (a) to find the expression for $C$.

Separating variables for the given differential equation:
∫1C0−kC dC=∫1L dx\int \frac{1}{C_0 - kC} \, \mathrm{d}C = \int \frac{1}{L} \, \mathrm{d}x
−1kln⁡(C0−kC)=xL+A-\frac{1}{k} \ln(C_0 - kC) = \frac{x}{L} + A
Using the initial condition C=C0C = C_0 when x=0x = 0:
A=−1kln⁡(C0(1−k))A = -\frac{1}{k} \ln(C_0(1-k))
ln⁡(C0−kCC0(1−k))=−kxL  ⟹  C0−kC=C0(1−k)e−kxL\ln \left( \frac{C_0 - kC}{C_0(1-k)} \right) = -\frac{kx}{L} \implies C_0 - kC = C_0(1-k)\mathrm{e}^{-\frac{kx}{L}}
C=C0k[1−(1−k)e−kxL]C = \frac{C_0}{k} \left[ 1 - (1-k)\mathrm{e}^{-\frac{kx}{L}} \right]

2. Analyze the effect of a shorter melt zone length $L$ on the impurity concentration $C$.

From the expression for CC, for a shorter length LL, the value of kxL\frac{kx}{L} is larger, making e−kxL\mathrm{e}^{-\frac{kx}{L}} smaller.
Since 1−k>01-k > 0, the term 1−(1−k)e−kxL1 - (1-k)\mathrm{e}^{-\frac{kx}{L}} becomes larger.
Therefore, a shorter length LL results in a larger CC for any given x>0x > 0.
(Alternatively, directly from dCdx=1L(C0−kC)\frac{\mathrm{d}C}{\mathrm{d}x} = \frac{1}{L}(C_0 - kC), a smaller LL yields a larger positive dCdx\frac{\mathrm{d}C}{\mathrm{d}x}, meaning CC increases more rapidly.)

3. Relate the higher concentration $C$ to the purity of the solidifying crystal to draw a conclusion.

A larger CC means a higher concentration of impurities in the melt zone.
Because the newly formed single crystal draws its material from this melt zone, a higher impurity concentration in the melt leads to a higher concentration of impurities solidifying into the crystal.
As this makes the single crystal less pure, a shorter length is not preferable.

答案

A shorter length is not preferable, because it leads to a higher rate of increase in impurity concentration in the melt zone, which causes the solidifying single crystal to be less pure.

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